Equipment

   Spares

   Materials

   Cleanroom Workstations

Novellus Part # Description

22-293                  FILTER,TEOS

22-277                  NUT,TEOS

22-262                  SEAL, OUTER SHAFT, 1" ID

10-00375-00             TUBE ASSY, .005 ID, SSI/VCR

10-08169-00             INJECTORS, PAIR, VERSION 3

16-024504-01A           PRE-GATE VALVE FORELINE

05-00006-00             QUAD SEAL/WTM QUARTERLY PM

02-00216-00             PC ASSY, TC FILTER

22-00199-00             ELBOW, UNION, 3/8", O-SEAL

39-00110-00             BULKHEAD, LF RF HEATER FILTER

02-00343-03             SENSOR, OPTICAL, C3 NEST

43228                   STUD, SHOWER HEAD

43254                   NUT, STUD, SHOWER HEAD

51287                   SCREW, NICKEL, SHOWER HEAD

MDV-38-100B             VALVE, THROTTLE

43345                   BAFFLE, SHOWER HEAD